JPH0189108U - - Google Patents
Info
- Publication number
- JPH0189108U JPH0189108U JP18532687U JP18532687U JPH0189108U JP H0189108 U JPH0189108 U JP H0189108U JP 18532687 U JP18532687 U JP 18532687U JP 18532687 U JP18532687 U JP 18532687U JP H0189108 U JPH0189108 U JP H0189108U
- Authority
- JP
- Japan
- Prior art keywords
- soft bag
- belt
- substrate
- boundary
- cylindrical body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18532687U JPH0445850Y2 (en]) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18532687U JPH0445850Y2 (en]) | 1987-12-07 | 1987-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189108U true JPH0189108U (en]) | 1989-06-13 |
| JPH0445850Y2 JPH0445850Y2 (en]) | 1992-10-28 |
Family
ID=31476645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18532687U Expired JPH0445850Y2 (en]) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445850Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06120367A (ja) * | 1992-10-02 | 1994-04-28 | Alps Electric Co Ltd | セラミック基板の分割方法およびその分割装置 |
| JPH0722357A (ja) * | 1990-05-25 | 1995-01-24 | Internatl Business Mach Corp <Ibm> | 半導体ウェーハ一括切断及び切断切子面被覆方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2505594A4 (en) | 2009-11-27 | 2013-11-06 | Sumitomo Seika Chemicals | PROCESS FOR PRODUCING WATER-ABSORBING RESIN PARTICLES, WATER ABSORBING RESIN PARTICLES, WATER-STOPPING MATERIAL, AND ABSORBENT ARTICLE |
| JP6481465B2 (ja) * | 2014-08-21 | 2019-03-13 | 三星ダイヤモンド工業株式会社 | 複合基板のブレイク方法 |
-
1987
- 1987-12-07 JP JP18532687U patent/JPH0445850Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722357A (ja) * | 1990-05-25 | 1995-01-24 | Internatl Business Mach Corp <Ibm> | 半導体ウェーハ一括切断及び切断切子面被覆方法 |
| JPH06120367A (ja) * | 1992-10-02 | 1994-04-28 | Alps Electric Co Ltd | セラミック基板の分割方法およびその分割装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445850Y2 (en]) | 1992-10-28 |